Wet Process Heating and Cooling Equipment

TIH Series, Fluoropolymer Inline Heaters

The TIH Series in-line fluoropolymer heater is ruggedly designed for the most demanding recirculation or single pass chemical applications and to provide years of trouble-free performance. The heater is typically used in conjunction with a chemical bath or spray system with an external pump/filter. The heater provides high purity heating of chemistry for the semiconductor, FPD, MEMS, biomedical, photovoltaic and other industries.
TIH Series Applications Include:

SC1: ammonium hydroxide (NH4OH), and hydrogen peroxide (H2O2)

SC2: hydrochloric acid (HCl), and hydrogen peroxide

Buffered oxide etch (BOE) process: hydrofluoric acid (HF) and ammonium fluoride (NH4F)

Nitride etch/strip: phosphoric acid (H3PO4)

Various acids such as:

Hydrochloric (HCl)

Hydrofluoric (HF)

Acetic (C2H4O2)

Nitric (HNO3)

Sulfuric (H2SO4)

Sulfuric acid and hydrogen peroxide

Sulfuric acid and ozone (O3)

Hydrofluoric acid and glycol (C2H6O2)

Potassium hydroxide (KOH)

Sodium hydroxide (NaOH)

Electroless nickel

Electroless copper

Electroless gold

Deionized water

Some solvents (consult factory)

SPECIFICATIONS:

Service: In-line chemical heater with all fluoropolymer wetted surfaces for virtually any wet chemistry application

Temperature Range: Up to 180ºC chemistry

Maximum Working Pressure: 100 PSI (7 Bar) at 25°C, 60 PSI (4 Bar) at 180ºC

Heater Sizes: 1,000 watts up to 18,000 watts

Heater Voltages Available: 200 to 600 volts, single or three phase (12kW and larger require three phase)

Watt Density: 10 watts per square inch (1.5w/cm2)
Fluid Connections Available:

¼ -inch (6mm) to 1-inch (25mm) flared

½-inch (12mm) to 1-inch (25mm) Super 300 Type Pillar®

Other connections available, consult factory

Third Party Certifications: CE, UL, Semi S2 and S3

Warranty: One year
Element Purge:

Small amount of clean dry air (CDA) or N2 gas flows between the metal grounded element and the PTFE sheath

Purge minimizes potential for ionic contamination

Removes chemical permeation for longer service life

Standard Features:

· .027" (.69mm) PTFE sheathed grounded heating element for long service life

· Patented gas-purged element design

· FM4910 compliant materials of construction

· Rugged, heavy-wall chamber construction

¾-inch (19mm) thick

· 10' (3m) FEP sleeved power and control cables

· Process temperature sensors (FEP sheathed 1000 ohm RTD)

· Heater element overtemperature sensors (FEP sheathed 1000 ohm RTD)

· Heater element thermal cutoff device (TCO)

Options:

Alternate plumbing configurations

"J", "K", or "E" type process and element thermocouples

Lower watt density heaters for special applications

PVDF high temperature mounting brackets

Capacitive style liquid level verification

PID temperature control module

PLC temperature control module with patented Demand Anticipation Control (DAC^TM)

Element purge flow regulator panel including:

Back pressure switch

Flow meter

Flow regulator

Product Features and Benefits:

• Faster heatup: Single heater chamber sizes up to 18kW.
• Exceptionally clean performance: Thick fluoropolymer sheath minimizes permeation. Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.
• Long heater life for reduced cost of ownership (COO): Patented heater gas purge system continuously removes any chemical permeation and ensures long element life.
• Rugged construction: Thick walled chamber provides long service life in the harshest high temperature applications.
• Rapid installation: Customized plumbing connections available to match existing plumbing and ease installation.
• Outstanding chemical compatibility: All fluoropolymer wetted parts compatible with virtually any chemistry.
• Excellent temperature stability: Low watt density design enables accurate control of process temperature.

Corzan® is a registered trademark of The Lubrizol Corporation

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For more information on this, or any other Process Technology product, please contact our offices (toll free within the United States or Canada) for the distributor nearest you, or visit our contact page.

U.S./Canada: 800-621-1998
Worldwide: 440-974-1300

Wet Process Heating and Cooling Equipment

TIH Series, Fluoropolymer Inline Heaters

U.S./Canada: 800-621-1998 Worldwide: 440-974-1300

U.S./Canada: 800-621-1998
Worldwide: 440-974-1300